水导激光切割，完美远超你的想象

江苏激光联盟导读：微水刀激光手艺的发现者和专利具有者，喜诺发（Synova）水导激光切割，其切割的水平远超你的想象。我们先看一下：中...Laser Microjet手艺是一项将激光与水刀连络的革命性切割工艺，经由过程如发丝般纤细的微水柱将激光束指导到晶圆上。与传统的切割编制不合的是，Laser Microjet操作微水柱来冷却材料概况，避免了材料概况的热损伤，从而获得了理想的呵护。同时，水流组成了一层勾当的自然呵护层，避免了污染物和熔渣附着。上述两个概况呵护特点改良、了传统切割工艺，进而除夜幅度晋升了器件的良品率。Laser Microjet的加工品质超卓、机能不变、靠得住性高、呵护简纯挚真，无需操作并替代切割刀具。与以往的切割工艺对比，微水刀激光手艺下降了芯片制造商的出产成本。该工艺切割超薄晶圆的速度高达mm秒；切割道平行狭小，其宽度从微米到微米不等，且不受晶圆厚度的制约。LDS 的益处还搜罗：水射流冷却手艺消弭了热应力。没有污染物附着，不需要概况呵护层。超卓的切割品质，无毛刺和碎屑。避免了传统切割编制在晶圆边缘发生的材料碎屑、崩角和裂隙。不存在机械应力，是以晶粒的机械强度很高，除夜除夜晋升了封装良品率。功能强除夜－除能够完成高品质的切割，还能够在晶圆上钻孔、划线、开槽、边缘抛光、打标等。可进级的工艺，在半导体行业的操作规模宽泛，搜罗Low-k晶圆、砷化镓（GaAs）晶圆、太阳能电池、功率半导体、共用晶圆（MPW）或超薄晶圆等。实现肆意厚度的贯串切割操作尺度划片胶带 工作事理The Laser MicroJet (LMJ) is a hybrid method of machining, which combines a laser with a "hair-thin" water jet that precisely guides the laser beam by means of total internal reflection in a manner similar to conventional optical fibers. The water jet continually cools the cutting zone and efficiently removes debris.As a “cold, clean and controlled laser”, Synovas LMJ technology resolves the significant problems associated with dry lasers such as thermal damage, contamination, deformation, debris deposition, oxidation, micro-cracks and taper.Comparison of Conventional and MicroJet Laser Beams(Left)The conventional focused laser beam has a limited working distance of just a few millimetres to even fractions of a millimetre due to beam divergence. This not only makes precise focusing and distance control necessary, it also limits the ratio of kerf width to depth. (Right)The LMJ technology employs a laser beam that is completely reflected at the air-water interface. The beam can be guided over a distance of up to cm, enabling parallel high aspect ratio kerfs. No focusing or distance control is required.微水导激光手艺参数激光半导体泵浦的脉冲Nd：YAG激光为，脉冲勾留时刻为毫秒或纳秒规模，运行在nm或nm的波长；平均激光功率规模为 W到 W 水纯净的离子化水和过滤的水水的破耗斗劲低，是因为流水的直径很是细，在- Bar的压力下，一小时破钞除夜约升水酿成的额外压力可以轻忽不计 (喷嘴喷嘴是sapphire或金刚石所制造的，这些材料的硬度很是高，甚至于可以在全数加工过程中发成长的，不变的水射流。喷嘴枝晶规模为：- μm。GE已将该手艺用于制造燃气涡轮叶片，采纳冷加工的编制进行制孔加工。再一次领略一下它的魅力：Synova年成立，是LMJ手艺的草创者，细算下来，这项手艺也已年了，不知道巨匠谁用过。文章来历：IT治理信息化之家和Synova网站